| 摘要 |
1,269,263. Measuring semi-conductor doping density. WESTERN ELECTRIC CO., Inc. April 25, 1969 [April 25, 1968], No.21257/69. Heading G1U. To determine the doping density at a predetermined depth from a face of a semi-conductor wafer having a doping impurity diffused therein, a depletion layer extending to the depth is established in the wafer and an alternating current is established across the wafer. The amplitude of the voltage appearing across the wafer which is at the second harmonic of the current frequency is detected and is used to indicate the doping density at the edge of the depletion layer. The depletion layer is established by forming a Schottky barrier diode on a part of the wafer surface by depositing a suitable material, and applying a reverse D.C. bias across the diode. Alternatively, reverse bias may be applied to a capacitive electrode or pn junction formed at the wafer surface. By adjusting the bias, the depth of the depletion layer can be varied. By detecting the fundamental of the voltage developed across the wafer, an indication of the depth may be provided. The amplitudes of the fundamental and the second harmonic are applied to respective axes of an XY recorder to provide an indicator of the doping profile as the depletion layer thickness is varied. (The second harmonic amplitude varies inversely as the doping density). It is shown in the Specification that for the second harmonic voltage to be inversely proportional to the doping density at the edge of the depletion layer the supply and output circuits across the wafer must appear to have very high impedance, so that a constant current is effectively applied. In a suitable circuit, the variable D.C. bias is applied to the wafer 12 via a 100 K resistor and choke, while constant current is supplied from a generator 31, via a filter 32 which suppresses second harmonics, to the wafer via a very small capacitor. Parallel LC networks are connected across the wafer, one providing an output signal to a fundamental voltage receiver 34, the other an output to a second harmonic receiver 33, the outputs from these being coupled to the XY recorder. To provide the proper impedance levels at the fundamental and second harmonic frequencies, the various L and C values in the system must be properly related to one another and to the fundamental frequency. |
