发明名称 SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要 <p>PURPOSE:To execute commands rapidly and reliably also for unordinary operations, by constructing a unit such that a command an be executed directly from a state in which a CRT displays a number of types and functions of commands in a list. CONSTITUTION:A CPU 31 discriminates whether a command inputted from a keyboard 12 is a help command or not. If it is a help command, the CPU 31 causes a CRT 11 to display a list of types and functions of commands and various comments. If it is selected to execute the command, the CPU 31 proceeds the command and thereafter returns to the command waiting state. Accordingly, the CPU 31 can execute a command directly from the state in which types and functions of commands are displayed without once returning as used conventionally to the command waiting state. As a result, the execution of commands can be performed rapidly and reliably.</p>
申请公布号 JPS62133719(A) 申请公布日期 1987.06.16
申请号 JP19850273428 申请日期 1985.12.06
申请人 CANON INC 发明人 MORI TAKASHI;SATO RYUICHI
分类号 G05B23/02;H01L21/02;H01L21/30 主分类号 G05B23/02
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