| 摘要 |
PURPOSE:To make the thermal load to an air conditioner minimum and attempt reduction in the equipment cost by reducing the number of devices to minimum by dividing the inside of a clean room into a space of high purity and a space of medium purity by means of a flow straightening plate. CONSTITUTION:A high-purity space 1 has a relatively high ceiling and it is provided with a HEPA filter 3 which cleans and blows the circulation air into the space 1 and a HEPA filter 4 which cleans and blows the air-conditioned air into the space 1, and the returning air returns by a straightening plate 9 which extends down from the ceiling along the boundary line of the high- purity space 1 and comes down to a height above a worker and a returning air suction opening 10 near the floor. The exhaust and circulation fan 14 blows clean air-conditioned air through a HEPA filter 4. On the other hand, a space 2 of medium purity is blown clean air-conditioned air through a HEPA filter 5 installed on the ceiling which is relatively low. Because of a relative small volume of the space 2, required purity can be obtained with a small amount of air-conditioned air. |
