| 摘要 |
PURPOSE:To make a vacuum container compact by using a plurality of cover materials for covering the openings of stowing boxes for a cryopump and sealing the storing boxes when the openings are closed. CONSTITUTION:The subject device is so constituted as to have cryopumps 5a and 5b, openings 21a and 21b, cryopump stowing boxes 20a and 20b, and a plurality of cover materials 25a, 25b, 26a and 26b. The cover materials 25a, 25b, 26a and 26b are so made as to seal the cryopump stowing boxes 20a and 20b, when all covering the parts 23 and 24 of the openings 21a and 21b. Therefore, each cover material can be small-sized, thereby reducing a space occupied thereby in a wide open condition, and making a vacuum container compact.
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