| 摘要 |
PURPOSE:To find the tilt angle of a component by cutting off edge slanting parts when there is edge slanting parts at both ends of a linear image and then obtaining the gradient of an approximate line by using the remaining data. CONSTITUTION:Cutting 3 is performed at both ends of the slit image 2 in a window 1 and then both ends of drooping slanting parts 5a and 5b at both ends of the slit image 2 are cut off at positions shown by lines 30 by about two bits in (x)-axial points x1 and xn. The gradient theta of the approximate line 4 is found by using the remaining data. Consequently, in case the slit image of drooping slanting parts of coat parts formed by irradiating a square component to be inspected which have corner parts rounded with a slit laser beam on the basis of the principle of a light cutting method is linearly approximated, errors are reduced greatly. |
