| 摘要 |
PURPOSE:To make a filament change ever so easy, by housing plural pieces of an ion generating part inclusive of a plasma production chamber in a vacuum box in making them solidly rotatable, and letting each plasma production chamber to be opposed to a drawer electrode system with the rotation. CONSTITUTION:A supporting plate 3 is rotatably attached to a vacuum body 1 via an insulator 2. And, four gas intake pipes 4A-4D and a filament electrode 9 are installed in the supporting plate 3, and four plasma production chambers 6A-6D are installed in their tips, forming a turning body 17. And, at usual, one of these plasma production chambers 6A-6D is used in making it to be opposed to an opening 12a of an ion beam drawer electrode 12, and at the time of consumption of a filament 8, the turning body 17 is rotated, having a new plasma procution chamber 6 opposed, and furthermore connection of power sources 14-16 is changed by a switch 18 and used. Therefore, a filament change is made performable under vacuum, thus operating efficiency is improvable.
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