| 摘要 |
PURPOSE:To prevent the damage of the material to be processed due to vibration by a method wherein the rotary vessel rotating with the material to be provided placed in it is rotated in the state wherein both ends of the rotary vessel are supported, thereby enabling to prevent the generation of vibration when the rotary vessel is rotated at a high speed. CONSTITUTION:The title device consists of a cylindrical box-like main body 1 having an opened top, a bearing plate 3 to be fixed on the main body 1 using two bolts in such a manner that the upper part of the main body 1 witll be covered and a cover 5, which is attached to the bearing plate 3 in such a manmer that it can be opened or closed by a pin 4, covers the entire bearing plate 3. The lower part of the rotating shaft 8 is supported by a motor 7, and the upper part of which is supported by the bearing plate 3 through the intermediary of a bearing 9. Consequently, as the rotary shaft 8 does not webble even when a rotary vessel 10 is rotated at a high speed, a large force is not added to the wafer 11, thereby enabling to prevent the generation of cracks and tippings on the wafer 11. |
