| 摘要 |
PURPOSE:To work the ABS part of a head slider at high accuracy and at high reliability forming a precision pattern by distortionless process using dry etching and thin film process. CONSTITUTION:An opposite face of a magnetic disk of a slider is made by laminating metal by thin film process and stepped shape is formed by dry etching. Plural head parts 33 are formed at specified spaces on a substrate 30, and ABS (shown by oblique lines) is ground. A masking member 34 is formed (4) on it by spattering, vapor deposition etc. Then, it is patterned to the shape of ABS by chemical etching. Specified step is formed by dry etching, and remaining masking material is removed and cut off. As machining is not used, no chipping and stress-strain occur in the ABS part and an ABS of high dimensional accuracy is formed.
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