| 摘要 |
PURPOSE:To obtain the uniformly treated result by a method wherein the treating fluid jetted to between the electrodes is sufficiently stirred by forming the treating fluid nozzles, which are formed opposing to the face of the electrode on one side, with a gradient relative to the opposing face. CONSTITUTION:A pair of flat electrodes 4 and 5 are positioned in the interior of a reaction container 3 facing each other horizontally. A high-frequency power source 8 is connected to the electrodes through support pillars 6 and 7 supporting each of the electrodes 4 and 5. At that time, a plurality of nozzles 14 provided in a concentric circle form are formed on the central part side of the electrode 5 with a gradient relative to the opposing face of the electrode 5. Whereupon, the flows of etching gas 12 to be jetted through the nozzles 14 are mutually interlaced, turbulent flows are formed and the atmosphere of the gas 12 is stirred and is uniformly distributed. Hereby, the uniformly treated result is obtained.
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