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发明名称
摘要
申请公布号	JPS6287446(U)	申请公布日期	1987.06.04
申请号	JP19850180061U	申请日期	1985.11.21
申请人		发明人
分类号	B25J19/00;B03B5/52;B04B5/02;B25B11/00;H01L21/67;H01L21/677;H01L21/68;(IPC1-7):H01L21/68	主分类号	B25J19/00
代理机构		代理人
主权项
地址

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