| 摘要 |
PURPOSE:To reduce defects on a signal surface by providing a mechanism removing an unnecessary resist attaching to the end surface of an glass master disk to which the resist is applied. CONSTITUTION:The glass master disk 2 to which the resist has been applied is installed on the turntable 1 of a resist coating device, and is rotated at a low speed of about 300rpm. A dispenser 7 adjusts the dispensing pressure of a resist removing thinner and a coating amount. A tank 5 is pressurized by air or N2, and the thinner is smoothly pushed out through a 'Teflon(R)' tube 4 and an injection needle 3 from a thinner vessel 6. At that time, the dispensing pressure and a thinner flow are adjusted at 0.3kg/cm<2> and 20ml/min, respectively, and a resist removing range is set at amount 5mm from the outer periphery. After the thinner is discharged about 30sec, the discharge is stopped, and the number of rotation of the turntable 2 is up about 500rpm to rotate and dry.
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