P4 gas generator using the alkali metal polyphosphide MP15

摘要

MP15, where M is an alkali metal is used in a generator of P4 gas. KP15 is preferred. The generator is heated to produce the P4 gas. The generator may be used in various deposition processes such as chemical vapor deposition, vacuum evaporation, and molecular beam deposition. It is particularly useful in high vacuum processes below 10-3 Torr, particularly below 10-4 Torr such as vacuum evaporation and molecular beam deposition, for example vapor phase epitaxy and molecular beam epitaxy.