摘要 |
PURPOSE:To keep the electric resistance value of a cathode terminal section during electroforming constant so as to stabilize the electric current and, at the same time, to keep the depositing speed constant so as to obtain the electroformed layer of a uniform thickness at a high depositing rate, by previously arranging the cathode terminal before a conductive film is formed at the time of electroforming. CONSTITUTION:After a photoresist layer 2 is provided on a glass base plate 1, a cathode terminal 5 is first provided on the layer 2 and the surface is coated with a conductive film 3. A terminal fixing screw 7 and the cathode terminal 5 are connected with each other by a section other than a fixing screw 6'. The terminal 5 has a surplus in length and is flexible. When the cathode terminal 5 is arranged and fixed before forming the conductive film 3, a bonding agent which is less in gas discharging quantity is used. Therefore, the electric resistance value of the cathode terminal section can be suppressed to the utmost and the depositing efficiency is improved.
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