| 摘要 |
PURPOSE:To execute a highly accurate measurement by executing automatically approximate operation of a floating quantity, based on the maximum and the minimum values of both sides of an image pickup signal of a monochromatic light interference fringe which is varied periodically in accordance with the head floating quantity. CONSTITUTION:By an air flow passing through a turning transparent disk 3, a slider of a magnetic head part 4 floats, and an interference fringe is formed by the reflected light from the disk 3 and a slider surface of the head part, respectively, by the projection of a monochromatic light I1. This interference fringe is brought to an image pickup, and an image pickup signal whose brightness R is varied periodically in accordance with a head floating quantity (h) is processed by a CPU, etc. Also, even when a contrast of the interference light has been deteriorated, a floating quantity h0 corresponding to brightness R0 is measured automatically with a high accuracy without asking for a person's help by an approximate operation by an equation based on the maximum value Rmax and the minimum value Rmin of brightness of both its sides. In the equation (m) denotes an order of an interference image corresponding to the brightness R0.
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