| 摘要 |
PURPOSE:To reduce the quantity of leaking gas at a shaft seal by providing a powder scraping mechanism and a powder reservoir on the shaft seal part of a piston rod. CONSTITUTION:A powder produced by the reaction of water in the air with a UF6 gas, is deposited on a piston rod. The powder deposited on the surface of the piston rod is scraped off by a powder scraping brush 11, and the powder which was scraped off is collected in a powder reservoir 12. Accordingly, a leaked gas can enter a first chamber 14 passing through a clad seal 9. Thereby, the quantity of leaking gas at a shaft seal can be reduced, saving the capacity of a cold trap for recovering shaft-seal exhaust.
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