| 摘要 |
PURPOSE:To eliminate the need for coarse adjustment by previously fitting a cartridge type needle to a mother board fixed onto a prober base. CONSTITUTION:A mother board 5 is fastened to a wafer test prober 1, and an exclusive circuit 2a and a cartridge type needle (a probe card) 8a are mounted detachably onto the board 5. The needle 8a and the circuit 2a are connected by pins 6. According to the constitution, when the needle 8a is fitted onto the board 5, the height of the needle 8a is brought to approximately the same state as a needle having coarsely adjusted height. Consequently, the circuit 2a is fixed, and a wafer can be tested only by finely adjusting the height of the needle 8a, thus simplifying adjustment.
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