| 摘要 |
PURPOSE:To enable high speed drive of a sample so as to facilitate measurement under actual or near actual driving condition by arranging a measuring head for a sample below a vacuum sample table and assembling a conductor terminal into the sample table and a terminal table. CONSTITUTION:A carrier 31 is positioned at a preliminary chamber 29 and a sample is mounted on a sample table 22 or a sample finished of measurement is replaced. Then the preliminary chamber 29 is evacuated to specific degree and a gate 30 is opened to operate a linear rod 33 so as to insert the mounted sample together with the carrier 31 into a sample table holder 23. By driving a motor, a terminal table 24 is lifted, then a projection 66 of the terminal table 24 is fitted into a tapered hole 45 of the sample table 22, thus stopping the lifting, the lead wire or the electrode of the sample is connected electrically through a terminal 44 with a terminal 65. While, by driving the motor, a measuring head 25 is lifted by predetermined amount, then the measuring electrode of the measuring head 25 is connected electrically with the terminal 65. Consequently, by moving a slider 34 and the measuring head 25 to the right for positioning the sample below a mirror tube 35, the sample can be measured.
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