| 发明名称 |
Use of perfluoropolyethers in mechanical pumps. |
| 摘要 |
<p>A process is disclosed for the generation of a vacuum of ≦ 5.10-' Torr by means of mechanical pumps, wherein a perfluoropolyether having neutral end groups and containing light products having an average molecular weight of ≦ 1000 in amounts of S 50 ppm is used as operative fluid.</p> |
| 申请公布号 |
EP0223251(A2) |
申请公布日期 |
1987.05.27 |
| 申请号 |
EP19860116084 |
申请日期 |
1986.11.20 |
| 申请人 |
AUSIMONT S.P.A. |
发明人 |
CALLONI, ENZO;TASCA, ADRIANA;STOPPA, LUIGI |
| 分类号 |
C10M107/38;F04C25/02;F04C29/02;F04B37/16 |
主分类号 |
C10M107/38 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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