摘要 |
<p>Micro-machining apparatus using a laser beam which can be focussed at a point on the work piece by an optical system including an objective, with the air of an aligning and observation optical system with at least a part of its optical path incommon with that of the laser, in the forom of a beam deflector. The special feature of the system is that the laser circuit is locked against functioning until the beam deflector is withdrawn from path of the laser beam.</p> |