| 摘要 |
PURPOSE:To improve the operating efficiency of a transferring apparatus by placing in mixture a tray for placing supplied parts such as IC chips having different types in a rack, and placing the tray on a plurality of index table, thereby eliminating the interruption of a transferring work of next step by a robot. CONSTITUTION:An index table 7 is turned counterclockwise at 180 deg. to position one tray 4 for placing a wafer 15 at a position, for example, designated by 2-dotted chain line. An element is finely adjusted by the drives of X-Y tables 10, 12 according to an image recognition signal obtained from an ITV camera 13 so that the element is moved, for example, to the transferring position of a robot 14 such as a position (c). The element in the wafer 15 is sequentially transferred by the robot 14 at every fine adjustment. After the transfer of the wafer 15 is completed, the table 7 is turned counterclockwise at 90 deg., the tray 14 for placing a plurality of trays 17 is transferred to the transferring position, and IC chips 15 in the dish 17 are transferred similarly to the above.
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