| 摘要 |
PURPOSE:To attenuate vibration and improve positioning precision, by arranging viscoelastic units at the coupling sections of a magnet assembly unit. CONSTITUTION:A magnet assembly unit 1 is organized by bonding magnets 10 to yokes 11, and the yokes 11, a side yoke 11-1, a side yoke 11-1, and the yoke 11 are connected to one another with bolts. Then, a counter yoke 13 is connected to the yokes 11 and the center yoke 12 via viscoelastic units 20. A voice coil is inserted as if it surrounds the center yoke 12, and a voice coil motor is organized. As the viscoelastic units 20, tape-formed attenuation material or the like is used. Then, at the sections of the viscoelastic units 20, energy is consumed, and the displacement of the assembly unit 1 is decreased, and the vibration and amplitude of the whole positioning device can be reduced.
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