发明名称 |
Gas sensor and method of fabricating same |
摘要 |
A rapid-response gas sensor for measuring the relative presence of a gas in a mixture of gases and its method of manufacture. The sensor is fabricated using microelectronics technology to form multiple thin-film solid-electrolyte pump and sense cells within a hermetically sealed sensor cavity.
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申请公布号 |
US4668374(A) |
申请公布日期 |
1987.05.26 |
申请号 |
US19860882689 |
申请日期 |
1986.07.07 |
申请人 |
GENERAL MOTORS CORPORATION |
发明人 |
BHAGAT, JAYANT K.;HOWARTH, DAVID S. |
分类号 |
G01N27/407;G01N27/419;(IPC1-7):G01N27/58 |
主分类号 |
G01N27/407 |
代理机构 |
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代理人 |
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地址 |
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