| 摘要 |
PURPOSE:To avoid the displacement of positions of a semiconductor stem mounted to a stem placing base mounted on a finely movable base and a cap held in an upper cap holder and to simultaneously prevent the cap from floating at energizing time by maintaining the positional relationship between the stem and the cap after regulating the positions by the tension of a spring from above and a vacuum strength from below. CONSTITUTION:To weld a semiconductor stem and a cap, the semiconductor stem 1 is mounted on the upper surfade of a stem placing base 3, and a cap 9 is held on the lower surface of a cap holder 8. Then, a hanging mechanism 6 is moved down, temporarily stopped at a position immediately before the cap 9 contacts the stem 1, a finely movable base 5 is regulated to be moved to position the stem 1 to the cap 9, the mechanism 6 is then moved down to contact the cap 9 under pressure with the stem 1 by the tension of a spring 11. Since it is evacuated in vacuum via a through hole formed at the base 3 at this time, the cap 9 is held by the vacuum strength in the pressure contacting state. Since the cap holder 8 for moving down the mechanism 6 cannot move down, the only mechanism 6 moves down to contact electrodes 7, 7 moved integrally down with the cap 9.
|
