| 摘要 |
PURPOSE:To prevent the malfunction in the shifting of a semiconductor wafer by mounting passage detectors for the semiconductor wafer to an inlet and an outlet for a shifting rail and conducting the detection of the number of passage of the semiconductor wafers, the detection of trouble on shifting or detections for both. CONSTITUTION:When a rocking arm 6 is started and a wafer 1 is pushed out to the shifting rail 4, 5 sides from a cassette 3, inlet sensors 20 are turned ON, outlet sensors 21 are turned ON when the wafer 1 is moved forward, the inlet sensors 20 are turned OFF when the wafer proceeds, and outlet sensors 21 are turned OFF and the wafer 1 is shifted onto the boat 3. When the inlet sensors 20 and the outlet sensors 21 are turned ON and the inlet sensors 20 or the outlet sensors 21 are turned OFF within the set time of a timer, an alarm is given and the shifter is stopped temporarily. When the inlet sensors 20 and the outlet sensors 21 are not turned ON within the set time of the timer, the cassette 3 is forwarded up to a groove for the wafer 1 and operation is continued. Accordingly, the wafer is detected positively, and a malfunction is eliminated.
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