| 摘要 |
PURPOSE:To reduce the capacity of a blower by making the sectional areas of exhaust paths in a mixed gas circulating system smaller than the sectional area of a discharge tube. CONSTITUTION:A discharge tube 1, in which a glow discharge is generated, is linked with a circulating system 3 composed of supply tubes 5, exhaust tubes 6 and a root blower 7. Mixed gas 4 is circulated by the operation of the blower 7. A heat exchanger 8 is provided in an exhaust tube 6. The sectional areas S1 and S2 of the exhaust tubes 6 are determined to be smaller than the sectional area S3 of the discharge tube 1. With this constitution, a resistance in the exhaust tubes against the flow of the mixed gas 4 which is heated and expanded by the glow discharge in the discharge tube 1 is reduced and the mixed gas 4 can flow smoothly. Therefore, the capacity of the root blower 7 can be re duced so that the size of a gas laser generator can be reduced. |
