发明名称 ION MICROBEAM DEVICE
摘要 PURPOSE:To enable ions to be emitted quite stably for a long term by providing a driving section for driving the movable section of an emitter from the outside of a vacuum container, while constructing said driving section and the movable section to be mounted to and demounted from each other. CONSTITUTION:Under fused condition of ionized material 10, the emitter 7 can be moved finely up and down by rotating the knob 35 of a driving means 21, for properly maintaining the quantity and the holding condition, of liquid metal 10 to be held on the underface of a sump 11 and the circumference at the tip of the emitter 7. While a take-out voltage is applied onto an ion take-out electrode 14 and upon confirmation of emission of ions, the driving section 21 is separated from a movable section 9 to maintain a distance between the driving means 21 and the movable means 9 for preventing discharge between them 21, 9 just by maintaining said distance. Upon lowering of the accelerating voltage, the driving section 21 and the movable section 9 are combined together then the knob 35 is rotated to take the emitter 7 into/out of the liquid metal 10, thus enabling ions to be continuously emitted for a long time.
申请公布号 JPS62103948(A) 申请公布日期 1987.05.14
申请号 JP19850241417 申请日期 1985.10.30
申请人 HITACHI LTD 发明人 UMEMURA KAORU;YAMAOKA SHOSAKU;IRIE TAKEO;ISHITANI TORU;KAWANAMI YOSHIMI
分类号 H01J27/26;H01J37/08 主分类号 H01J27/26
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