发明名称 EXPOSING APPARATUS
摘要 PURPOSE:To eliminate an errors in the amount of exposure due to overshoot, ringing and the like accompanied by an increase in illuminance of a light source and to perform operation with the accurate amount of exposure, by inserting a delay time when the illuminance of the light source is increased, and delaying the start of the exposure by the specified time. CONSTITUTION:When preset exposure quantity data Io is inputted from a console 8, an exposure controller CPU 7 issues an illuminance increasing command to an illuminance control part 2 so as to increase the illuminance of a light source LP. Then the exposure controller CPU 7 takes a delay time, which includes times for overshoot, ringing and the like of the light source LP and is required for increasing the illuminance. Thus, stabilization of the light source LP is awaited. Then, the exposure controller CPU 7 sends a shutter opening command to a shutter control part 4, and a shutter ST is opened through a driving circuit 3. Exposing luminous flux, which has passed the shutter, is inputted into a detector D1 for computing the amount of the exposure. The luminous flux undergoes photoelectric conversion. The output current is inputted to a conversion amplifier 5. The current is converted into a voltage and amplified. Computation is performed in a computing circuit 6. Computed exposure- quantity data Ia is supplied to the exposure controller CPU 7.
申请公布号 JPS62104123(A) 申请公布日期 1987.05.14
申请号 JP19850242943 申请日期 1985.10.31
申请人 CANON INC 发明人 YUI TAKASUMI
分类号 H01L21/30;G03F7/20;H01L21/027 主分类号 H01L21/30
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