| 摘要 |
PURPOSE:To expand a region for forming metallic ion plasma of an electric discharge type ion plating apparatus and simultaneously to increase ionization efficiency and to contrive the improvement of ion plating efficiency by providing an anode other than a hearth anode. CONSTITUTION:One or more pieces of repeating discharge anodes 3 other than a hearth 2 (a magnet is incorporated therein.) combined with a main discharge anode are provided to the inside of an ion plating vessel and connected to an auxiliary discharge electric power source 4 and metallic ion plasma is formed even in a place apart from the hearth 2. Thereby density of metallic ion is increased till the neighborhood of a plating metallic sample 6 positioned far from the hearth 2 by forming electric discharge current 5 due to a discharge plasma source (a cathode and an intermediate electrode) 1, the hearth 2 and the above-mentioned anodes 3. Still when the plasma current 5 is not effectively drawn by the anodes 3, the plasma current 5 is magnetically drawn by incorporating a permanent magnet in the insides of the anodes 3.
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