ETCH BACK PLANARIZATION,申请号GB19870008365-传众专利搜索

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发明名称	ETCH BACK PLANARIZATION
摘要
申请公布号	GB8708365(D0)	申请公布日期	1987.05.13
申请号	GB19870008365	申请日期	1987.04.08
申请人	INTEL CORPORATION	发明人
分类号	H01L21/3205;H01L21/768;(IPC1-7):H01L21/31	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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