| 摘要 |
PURPOSE:To reduce losses caused by inner distortion such as crack arising in a film and to improve reliability by forming multilayers with different thermal expansion coefficients as a protecting layer. CONSTITUTION:Materials P1 and P2 are evaporated by means such as an electronic gun, resistance heater, etc. After the material P1 is make into a film in the prescribed film thickness on a substrate, a shutter 8 is closed. Then a shutter 8' for the material P2 is opened to form the P2 in the prescribed film thickness. Those steps are sequentially repeated to laminate the thin film P1/P2..., whereby the film thickness of each layer is made thinner to reduce stress caused by the distortion arising in each layer. Furthermore losses can be minimized, and the reliability is improved accordingly. |
