| 摘要 |
PURPOSE:To exactly control the compsn. ratio of an In-Sb alloy film with food productivity by separately depositing two elements by evaporation on a substrate then subjecting the film to a heat treatment. CONSTITUTION:In is deposited by evaporation to 18nm on the acrylic substrate and while the vacuum is not broken, Sb is deposited by evaporation to 32nm thereon to form the film having 50nm total film thickness and 4:6 molar ratio of In and Sb. Such substrate is annealed for 2hr at 60 deg.C. Since the In atoms are easily diffusible in the metal, the uniform alloy from is formed by annealing in spite of the separated vapor deposition. The thin In-Sb alloy film having the exactly controlled compsn. ratio is thus obtd.
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