| 摘要 |
PURPOSE:To form a highly fine through hole by laminating the metallic layer specifying the reflectivity of light and Young's modulus on a resin layer and by irradiating a laser beam on this composite layer material. CONSTITUTION:A composite layer material is composed by laminating the metallic layer 1a, 1b of a Ni foil, etc. on both side faces of the resin layer 3 of a polyimide, etc. This metallic layer 1a, 1b is taken to have the reflectivity of the light in 1.0mu wavelength being about <=80%, the reflectivity of the light in 10.0mum wavelength being about <=97% and yet Young's modulus being about >=15X10<10>N.m<-2>. A through hole is formed by irradiating the laser beam of CO2, etc. on this composite layer material. In this way the opening 2a, 2b formed on the metallic layer 1a, 1b are almost in equal size and the peripheral contour becomes smooth as well. No uplift etc. is visible on the peripheral edge of the opening 4 of the resin layer 3 of the inner part as well and a highly fine laser beam machining can be performed. |
