HIGH-PURITY MOLYBDENUM TARGET AND HIGH-PURITY MOLYBDENUM SILICIDE TARGET FOR LSI ELECTRODES AND PROCESS FOR PRODUCING THE SAME

摘要

There is provided a high-purity molybdenum target or highpurity molybdenum silicide target for LSI electrodes which comprises a high-purity metallic molybdenum having an alkali metal content of not more than 100 ppb and a radioactive element content of not more than 10 ppb. Further, a process is provided for producing such target comprising a wet purification processing followed by a series of dry processings.