MANUFACTURE OF THIN FILM,申请号JP19850235748-传众专利搜索

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发明名称	MANUFACTURE OF THIN FILM
摘要
申请公布号	JPS6294943(A)	申请公布日期	1987.05.01
申请号	JP19850235748	申请日期	1985.10.21
申请人	NEC CORP	发明人	JITSUKAWA ASAKO
分类号	C23C14/06;C30B29/38;H01L21/318	主分类号	C23C14/06
代理机构		代理人
主权项
地址

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