| 摘要 |
<p>PURPOSE:To make it possible to measure high concn. main component gas and low concn. impure gas with extremely good accuracy, by providing a sample gas diluting means between a sample gas stream dividing means and each gas concn. detector. CONSTITUTION:The stream of the sample gas supplied from a sample gas introducing flow passage 3 is divided in a predetermined ratio by a sample gas stream dividing means X. These divided sample gas streams are further diluted by sample gas diluting means YI, YII to be supplied to gas concn. detectors DI, DII arranged in mutually parallel relation to the sample gas introducing flow passage 3. By this method, even in such a case that high concn. component gas are present in a mixed state, the sample gases supplied to the gas concn. detectors corresponding to respective component gases can be set to concns. suitable for measurement.</p> |
