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发明名称
Silicon nitride and process for its preparation.
摘要
Die vorliegende Erfindung betrifft verbessertes Siliciumnitrid in amorphem und kristallinem Zustand sowie Verfahren zu dessen Herstellung.
申请公布号
EP0219764(A2)
申请公布日期
1987.04.29
申请号
EP19860113935
申请日期
1986.10.08
申请人
BAYER AG
发明人
LAUBACH, BENNO, DR.;FRANZ, GERHARD, DR.;WICKEL, ULRIKE, DR.;SCHONFELDER, LOTHAR, DR.
分类号
C01B21/068;C04B35/626;(IPC1-7):C01B21/068
主分类号
C01B21/068
代理机构
代理人
主权项
地址
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