发明名称 SEALING METHOD FOR SEMICONDUCTOR CHIP
摘要 PURPOSE:To increase the mechanical strength of a sealing section by placing a circuit substrate onto a film with a fine hole, giving heat resistance and release properties, filling a hole in the circuit substrate on the film with a synthetic resin and peeling the film from the circuit substrate. CONSTITUTION:A semiconductor chip 1 bonded under a hung state by metallic small-gate wires 3 in a hole in a circuit substrate 2 is prepared previously. On the other hand, a lower base 4 is heated, and a film 8 is annexed onto the lower base 4. The film 8 is a Teflon film abounnding in heat resistance and release properties, and fine holes are formed to the film. The circuit substrate 2 is placed on the film 8, and a sealing frame 9 is applied and the upper surface and peripheral section of the chip are coated with an epoxy resin. The resin is cured, and the film 8 is peeled from the substrate 2.
申请公布号 JPS6292331(A) 申请公布日期 1987.04.27
申请号 JP19850231017 申请日期 1985.10.18
申请人 HITACHI MAXELL LTD 发明人 OKAMOTO TAKAYUKI;SUGAWARA TAKESHI
分类号 H01L21/56 主分类号 H01L21/56
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