| 摘要 |
PURPOSE:To facilitate the working of the minute pattern of the titled head by forming a recessed part having about the same shape and thickness as the lower magnetic layer at a position on the lower protective layer, forming the lower magnetic layer at the center of the recessed part and laminating an insulating layer and a conductor coil layer on the lower magnetic layer and the lower protective layer. CONSTITUTION:A pattern 3 for lift-off is formed on the substrate 1 of the magnetic head through the lower protective layer 2 as a mask. The recessed part having specified depth is formed on the protective layer 3 with reactive sputter etching by using the pattern 3 as the mask and using gaseous freon. Then a cobalt-zirconium-niobium alloy layer 4 is formed in specified thickness by sputtering, the alloy layer 4 is released by releasing the pattern 3 and the lower magnetic layer 5 is formed. Then a gap film layer 6 is formed and then the lower insulating layer 7 and the conductor coil layer 8 are formed on the lower magnetic layer 5. The upper insulating layer 9 and the upper magnetic layer 10 are further laminated thereon and the working of the magnetic pattern is facilitated. |
