PATTERING METHOD FOR THIN FILM,申请号JP19850229280-传众专利搜索

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发明名称	PATTERING METHOD FOR THIN FILM
摘要
申请公布号	JPS6288322(A)	申请公布日期	1987.04.22
申请号	JP19850229280	申请日期	1985.10.15
申请人	SEIKO EPSON CORP	发明人	HORIKAWA MITSUHIRO
分类号	H01L21/302;G03F7/20;G11B7/26;H01L21/027;H01L21/30;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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