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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6284551(A)
申请公布日期
1987.04.18
申请号
JP19850224011
申请日期
1985.10.08
申请人
FUJITSU LTD
发明人
UENO KATSUNOBU
分类号
H01L27/12;H01L21/205;H01L21/331;H01L21/86;H01L29/72;H01L29/73;H01L29/732
主分类号
H01L27/12
代理机构
代理人
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地址
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