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发明名称
HEAT CONDUCTOR FOR ION TREATING APPARATUS
摘要
申请公布号
JPS6283466(A)
申请公布日期
1987.04.16
申请号
JP19850222589
申请日期
1985.10.05
申请人
NISSIN ELECTRIC CO LTD
发明人
KATO YOSHINAO
分类号
C23C14/50;C23F4/00
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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