发明名称 |
INTERFERENTIAL MEASURING METHOD FOR SURFACES |
摘要 |
A surface to be tested is illuminated with two beams polarized perpendicularly to each other, extending symmetrically to an optical axis and focussed on the surface by a lens. The light scattered at the surface is separated from the directly reflected light by a reflecting diaphragm, and by means of electro-optical compensation (with an electro-optical modulator and photodetector) the scattered light is tested for phase difference which is a function of the distance of a scattering element of the surface from the optical axis. The phase difference within the illuminated spot is a unique function of the distance of the scattering element from the optical axis, if a diffraction-limited optical system is used. |
申请公布号 |
DE3275657(D1) |
申请公布日期 |
1987.04.16 |
申请号 |
DE19823275657 |
申请日期 |
1982.12.20 |
申请人 |
IBM DEUTSCHLAND GMBH;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
MAKOSCH, GUNTER, DIPL.-PHYS.;SCHEDEWIE, FRANZ, DR., DIPL.-PHYS. |
分类号 |
G01B11/02;G01B11/30;G03F7/20;G03F9/00;(IPC1-7):G01B11/30;G01B9/02 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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