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发明名称
TRANSFERRING METHOD FOR FINE PHOTORESIST STRUCTURE
摘要
申请公布号
JPS6281717(A)
申请公布日期
1987.04.15
申请号
JP19860229468
申请日期
1986.09.27
申请人
SIEMENS AG
发明人
HANSU IERUKU RAIHIERUTO
分类号
H01L21/30;H01L21/027;H01L21/302;H01L21/3065;H01L21/311;H01L21/3115
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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