| 发明名称 |
Process and apparatus for making ohmic contacts between metal and semiconductor |
| 摘要 |
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| 申请公布号 |
GB2181297(A) |
申请公布日期 |
1987.04.15 |
| 申请号 |
GB19860020131 |
申请日期 |
1986.08.19 |
| 申请人 |
* SGS MICROELETTRONICA S P A |
发明人 |
GIULIO * IANNUZZI |
| 分类号 |
H01L21/768;H01L21/28;H01L21/285;H01L21/3065;(IPC1-7):H01L21/467;H01L21/44 |
主分类号 |
H01L21/768 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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