| 摘要 |
PURPOSE:To generate high-output-power laser light characterized by excellent symmetry in space intensity distribution, by specifying the configuration of an electrode. CONSTITUTION:When discharge is started, a tip part 15a of a discharge starting electrode 15 at the inside forms an acute angle. Therefore, the field intensity in the vicinity of the discharge starting electrode becomes large. Glow discharge is ignited between the discharge starting electrode 15 and a cathode 12 at first. The value of a stabilized impedance unit 17, which is connected to the discharge starting electrode is sufficiently larger than the value of a stabilized impedance unit 16, which is connected to an anode 13. Therefore, with the increase in glow current, glow discharge 9 is ignited between the cathode 12 and the anode 13. With the increase in current, the negative flow is extended in the downstream direction of a gas flow 2. The igniting region of the glow discharge is expanded in correspondence with the value of the glow current. Thus, the discharge space is expanded in correspondence with the discharge current value without local increase in power density in the space. |
