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发明名称
摘要
申请公布号
JPS6216534(B2)
申请公布日期
1987.04.13
申请号
JP19790013711
申请日期
1979.02.07
申请人
MATSUSHITA ELECTRONICS CORP
发明人
TODOKORO YOSHIHIRO;TAKEDA SETSUKO;KAWAMOTO YOSHIHISA
分类号
H01L29/812;H01L21/027;H01L21/28;H01L21/30;H01L21/306;H01L21/338
主分类号
H01L29/812
代理机构
代理人
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