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发明名称
BIAS SPUTTERING DEVICE
摘要
申请公布号
JPS6280266(A)
申请公布日期
1987.04.13
申请号
JP19850219670
申请日期
1985.10.02
申请人
ANELVA CORP
发明人
FUKUSHIMA SHIRO
分类号
C23C14/40;H01L21/203;H01L21/31
主分类号
C23C14/40
代理机构
代理人
主权项
地址
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