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发明名称
PROCESSING DEVICE
摘要
申请公布号
JPS6279642(A)
申请公布日期
1987.04.13
申请号
JP19850220656
申请日期
1985.10.03
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMAMOTO KANEHISA
分类号
H01L21/66;H01L21/67;H01L21/677;H01L21/68
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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