| 摘要 |
PURPOSE:To obtain a charge transfer device which has small load capacity as observed from an external clock terminal even when transfer stages are increased and does not affect the influence to the transfer of signal charge with uniform heating by dispersing clock drivers as small heat generation corresponding to transfer electrodes. CONSTITUTION:Clock drivers 16-1-16-9 for driving transfer electrodes 2-1-2-9 are provided in the same number as the transfer electrodes in the vicinity, and integrated in an array parallel to the electrodes in a semiconductor substrate 1. Driver pulse input terminals 20 are connected to clock drivers 16-1-16-9. Then, terminals 21-23 are wired to connect at every three clock drivers. Thus, the input capacitances of the drivers are set smaller than the electrodes, the drivers causing the heats to generate are distributed to array on a chip. Accordingly, on-chip drivers uniformized in heat generation is formed with small load capacity. |
