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发明名称
VACUUM DEPOSITION DEVICE
摘要
申请公布号
JPS6274069(A)
申请公布日期
1987.04.04
申请号
JP19850213164
申请日期
1985.09.25
申请人
SHIMADZU CORP
发明人
OKADA SHIGENOBU
分类号
C23C14/26
主分类号
C23C14/26
代理机构
代理人
主权项
地址
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